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Milczarek M., Jarząbek D., Jenczyk P., Bochenek K., Filipiak M.♦, Novel paradigm in AFM probe fabrication: Broadened range of stiffness, materials, and tip shapes,
TRIBOLOGY INTERNATIONAL, ISSN: 0301-679X, DOI: 10.1016/j.triboint.2023.108308, Vol.180, No.108308, pp.1-12, 2023 Streszczenie:
Atomic force microscopes could be used in wide range of nanotribology experiments but probes available on the market are only made of silicon or silicon nitride with a stiffness in the range of 0.01–100 N/m, which significantly limits the possible research. We strive to solve this problem by designing all-metal probes. The proposed fabrication method is characterised by the use of a copper substrate and electrodeposition in a mould prepared by indentation and photolithography. Prototype probes fabricated with this method were made of nickel with a stiffness of 20 N/m and 2800 N/m and were used for topography and friction measurements. Both the method and all-metal probes showed flexibility and great potential, especially in the field of nano/microtribology. Słowa kluczowe:
Atomic force microscopy, Microfabrication, Cantilever, Metal probe, Friction, Nanotribology Afiliacje autorów:
| Milczarek M. | - | IPPT PAN | | Jarząbek D. | - | IPPT PAN | | Jenczyk P. | - | IPPT PAN | | Bochenek K. | - | IPPT PAN | | Filipiak M. | - | inna afiliacja |
|  | 200p. |
