| 1. |
Wierzbicki R.♦, Schmidt M.S.♦, Boisen A.♦, Engstrom D.♦, Molhave K.♦, Boggild P.♦, Black silicon maskless templates for carbon nanotube forests,
MICROELECTRONIC ENGINEERING, ISSN: 0167-9317, DOI: 10.1016/j.mee.2012.11.019, Vol.104, pp.110-113, 2013 Abstract:
We present here a proof of concept for a novel fabrication method of vertically aligned carbon nanotube forests, utilizing black silicon nanograss (a forest of silicon nanometer-sized spikes created with reactive ion etching) coated with titanium tungsten diffusion barrier as a template. The method allows maskless definition of carbon nanotube forests with control of their density, nanotube diameter and height. Four nanograss reactive ion etching recipes are investigated and their wafer-to-wafer repeatability, wafer uniformity, and density control is discussed. Evaluation of carbon nanotube forests grown on the nanograss substrates is presented with discussion of their morphology, diameter distribution, and catalyst thickness influence. Keywords:
Carbon nanotubes, Black silicon, Nanograss, Maskless, Catalyst, Titanium tungsten Affiliations:
| Wierzbicki R. | - | other affiliation | | Schmidt M.S. | - | Institute of Electronic Materials Technology (PL) | | Boisen A. | - | DTU Nanotech (DK) | | Engstrom D. | - | Isfahan University of Technology (IR) | | Molhave K. | - | Technical University of Denmark (DK) | | Boggild P. | - | DTU Nanotech (DK) |
|  |
